Fundamentals of Heat and Mass Transfer
7th Edition
ISBN: 9780470501979
Author: Frank P. Incropera, David P. DeWitt, Theodore L. Bergman, Adrienne S. Lavine
Publisher: Wiley, John & Sons, Incorporated
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Chapter 1, Problem 1.34P
A vacuum system, as used ¡n sputtering electrically conducting thin films on microcircuits, is comprised of a baseplate maintained by an electrical heater at 300 K anda shroud within the enclosure maintained at 77 K by aliquid-nitrogen coolant loop. The circular baseplate, insulated on the lower side, is 0.3 m in diameter and has an emissivity of 0.25.
(a) How much electrical power must be provided tothe baseplate heater?
(b) At what rate must liquid nitrogen be supplied to theshroud it its heat of vaporization is 125 kJ/kg?
(e) To reduce the liquid nitrogen consumption, it isproposed to bond a thin sheet of aluminum foil
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Chapter 1 Solutions
Fundamentals of Heat and Mass Transfer
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