Manufacturing Engineering & Technology
Manufacturing Engineering & Technology
7th Edition
ISBN: 9780133128741
Author: Serope Kalpakjian, Steven Schmid
Publisher: Prentice Hall
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Chapter 28, Problem 34QTP

If a square mask of side length 100 μm is placed on a {100} plane and oriented with a side in the 100 direction, how long will it take to etch a hole 5 μm deep at 80°C using ethylene-diamine/pyrocatechol? Sketch the resulting profile.

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