Manufacturing Engineering & Technology
Manufacturing Engineering & Technology
7th Edition
ISBN: 9780133128741
Author: Serope Kalpakjian, Steven Schmid
Publisher: Prentice Hall
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Chapter 28, Problem 32QTP

A certain design rule calls for metal lines to be no less than 2-μm wide. If a 1-μm thick metal layer is to be wet etched, what is the minimum photoresist width allowed (assuming that the wet etching is perfectly isotropic)? What would be the minimum photoresist width if a perfectly anisotropic dry-etching process is used?

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