EBK MANUFACTURING ENGINEERING & TECHNOL
EBK MANUFACTURING ENGINEERING & TECHNOL
7th Edition
ISBN: 8220100793431
Author: KALPAKJIAN
Publisher: PEARSON
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Chapter 28, Problem 34QTP

If a square mask of side length 100 μm is placed on a {100} plane and oriented with a side in the 100 direction, how long will it take to etch a hole 5 μm deep at 80°C using ethylene-diamine/pyrocatechol? Sketch the resulting profile.

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EBK MANUFACTURING ENGINEERING & TECHNOL

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