EBK MANUFACTURING ENGINEERING & TECHNOL
EBK MANUFACTURING ENGINEERING & TECHNOL
7th Edition
ISBN: 9780100793439
Author: KALPAKJIAN
Publisher: YUZU
Question
Book Icon
Chapter 28, Problem 30QTP
To determine

A chlorine-based polysilicon etching process displays a polysilicon-to-resist selectivity of 5:1 and a polysilicon-to oxide selectivity of 60:1 . Estimate the amount of resist and exposed oxide will be consumed in etching  3500 of poly silicon. Determine the poly silicon-to-oxide selectivity have to be in order to reduce the loss to only 40A0 of exposed oxide.

Blurred answer
Students have asked these similar questions
Consider the bar, shown in Figure 1 that undergoes axial displacement due to both a distributed load and a point force. The bar is of cross-sectional area A = 1.10-3 m², and has a modulus of elasticity E = 100 GPa. 1(x) = 5 kN/m x=0.0 x=2.0 2.0m 10 kN Figure 1: Bar domain with varying distributed forces. a) The general form of the governing equations describing the bar's displacement, u(x), is given by, d (AE du(x)) -) +1(x) = 0. d.x dx What are the accompanying boundary conditions for this bar? b) Using the mesh in Figure 2, form the basis functions associated with element 2 and write the FEM approximation over the element. 1 2 3 1 2 1m 1m Figure 2: Mesh of 2 elements. Elements are numbered with underlines. c) The general form of the element stiffness matrix system, with nodes indexed by i and j, is, AE Uj N;(x)l(x)dx – Ng(0)f(0) ¥ [4]}]{{}}={{{}\(\\+} + {N(2)f(2) = N (0)5() }, (1) 0, respectively. L = (2) where f(2) and f(0) denote the boundary forces at positions x 2 and x Evaluate…
answer please
amination) Question 1 Consider the bar, shown in Figure 1, that undergoes axial displacement due to both a distributed load and a point force. The bar is of cross-sectional area A = 1.103 m2, and has a modulus of elasticity E = 100 GPa. 1(x) = 5 kN/m 10 kN X x=0.0 x=2.0 2.0m Figure 1: Bar domain with varying distributed forces. a) The general form of the governing equations describing the bar's displacement, u(x), is given by, d (AE du(x)) + 1(x) = 0. dx dx What are the accompanying boundary conditions for this bar? MacBook Air a 会 DII F5 F6 F7 F8 80 F3 F4 0/ 20 [8 marksl 8 FO

Chapter 28 Solutions

EBK MANUFACTURING ENGINEERING & TECHNOL

Knowledge Booster
Background pattern image
Similar questions
SEE MORE QUESTIONS
Recommended textbooks for you
Text book image
Understanding Motor Controls
Mechanical Engineering
ISBN:9781337798686
Author:Stephen L. Herman
Publisher:Delmar Cengage Learning
Text book image
Precision Machining Technology (MindTap Course Li...
Mechanical Engineering
ISBN:9781285444543
Author:Peter J. Hoffman, Eric S. Hopewell, Brian Janes
Publisher:Cengage Learning