EBK MANUFACTURING ENGINEERING & TECHNOL
EBK MANUFACTURING ENGINEERING & TECHNOL
7th Edition
ISBN: 9780100793439
Author: KALPAKJIAN
Publisher: YUZU
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Chapter 29, Problem 3RQ

Why is silicon often used with MEMS devices?

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Students have asked these similar questions
For PCB, why do you need to know the thickness,diaelectric constant and loss tangent for design? What are they explain in basic terms?
What is bulk micromachining? For which MEMS applications is it used for and on what material(s)? Give examples of materials and techniques used to bulk-micromachine. Provide a process flow diagram of a fabrication process for a sample MEMS device that uses bulk micromachining technique
Discuss the importance of microchip manufacturing processes such as photolithography and etching in producing advanced microchips.

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EBK MANUFACTURING ENGINEERING & TECHNOL

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