In "Orthogonal Design for Process Optimization and Its Application to Plasma Etching" (Solid State Technology, May 1987), G. Z. Yin and D. W. Jillie describe an experiment to determine the effect of C2F flow rate on the uniformity of the etch on a silicon wafer used in integrated circuit manufacturing. Three flow rates are used in the experiment, and the resulting uniformity (in percent) for six replicates is shown below. Observations CF Flow (SCCM) 1 2 3
In "Orthogonal Design for Process Optimization and Its Application to Plasma Etching" (Solid State Technology, May 1987), G. Z. Yin and D. W. Jillie describe an experiment to determine the effect of C2F flow rate on the uniformity of the etch on a silicon wafer used in integrated circuit manufacturing. Three flow rates are used in the experiment, and the resulting uniformity (in percent) for six replicates is shown below. Observations CF Flow (SCCM) 1 2 3
MATLAB: An Introduction with Applications
6th Edition
ISBN:9781119256830
Author:Amos Gilat
Publisher:Amos Gilat
Chapter1: Starting With Matlab
Section: Chapter Questions
Problem 1P
Related questions
Question
![In "Orthogonal Design for Process Optimization and Its Application to Plasma Etching" (Solid State Technology, May 1987), G. Z. Yin and
D. W. Jillie describe an experiment to determine the effect of C,F. flow rate on the uniformity of the etch on a silicon wafer used in
integrated circuit manufacturing. Three flow rates are used in the experiment, and the resulting uniformity (in percent) for six
replicates is shown below.
Observations
C2F, Flow
(SCCM)
2
3
4
125
2.7 4.6 2.6 3.0 3.2 3.8
160
4.9 4.6 5.0 4.2 3.6 4.2
200
4.6 3.4 2.9 3.5 4.1 5.1
Use Fisher's LSD method with a = 0.05 to analyze the means of the three flow rates.
Choose the correct answer.
O There are significant differences between levels 125 and 160.
O There are significant differences between levels 125 and 200.
O There are significant differences between levels 160 and 200.
O There are significant differences between levels 125 and 160, 160 and 200.
O No significant differences.](/v2/_next/image?url=https%3A%2F%2Fcontent.bartleby.com%2Fqna-images%2Fquestion%2Fca680a7c-fa0d-4deb-bbf4-02b8938d3225%2Fe8287bd0-1a59-449b-894e-826ec5ac0a06%2F4nvyxn_processed.jpeg&w=3840&q=75)
Transcribed Image Text:In "Orthogonal Design for Process Optimization and Its Application to Plasma Etching" (Solid State Technology, May 1987), G. Z. Yin and
D. W. Jillie describe an experiment to determine the effect of C,F. flow rate on the uniformity of the etch on a silicon wafer used in
integrated circuit manufacturing. Three flow rates are used in the experiment, and the resulting uniformity (in percent) for six
replicates is shown below.
Observations
C2F, Flow
(SCCM)
2
3
4
125
2.7 4.6 2.6 3.0 3.2 3.8
160
4.9 4.6 5.0 4.2 3.6 4.2
200
4.6 3.4 2.9 3.5 4.1 5.1
Use Fisher's LSD method with a = 0.05 to analyze the means of the three flow rates.
Choose the correct answer.
O There are significant differences between levels 125 and 160.
O There are significant differences between levels 125 and 200.
O There are significant differences between levels 160 and 200.
O There are significant differences between levels 125 and 160, 160 and 200.
O No significant differences.
Expert Solution
![](/static/compass_v2/shared-icons/check-mark.png)
This question has been solved!
Explore an expertly crafted, step-by-step solution for a thorough understanding of key concepts.
Step by step
Solved in 2 steps with 1 images
![Blurred answer](/static/compass_v2/solution-images/blurred-answer.jpg)
Recommended textbooks for you
![MATLAB: An Introduction with Applications](https://www.bartleby.com/isbn_cover_images/9781119256830/9781119256830_smallCoverImage.gif)
MATLAB: An Introduction with Applications
Statistics
ISBN:
9781119256830
Author:
Amos Gilat
Publisher:
John Wiley & Sons Inc
![Probability and Statistics for Engineering and th…](https://www.bartleby.com/isbn_cover_images/9781305251809/9781305251809_smallCoverImage.gif)
Probability and Statistics for Engineering and th…
Statistics
ISBN:
9781305251809
Author:
Jay L. Devore
Publisher:
Cengage Learning
![Statistics for The Behavioral Sciences (MindTap C…](https://www.bartleby.com/isbn_cover_images/9781305504912/9781305504912_smallCoverImage.gif)
Statistics for The Behavioral Sciences (MindTap C…
Statistics
ISBN:
9781305504912
Author:
Frederick J Gravetter, Larry B. Wallnau
Publisher:
Cengage Learning
![MATLAB: An Introduction with Applications](https://www.bartleby.com/isbn_cover_images/9781119256830/9781119256830_smallCoverImage.gif)
MATLAB: An Introduction with Applications
Statistics
ISBN:
9781119256830
Author:
Amos Gilat
Publisher:
John Wiley & Sons Inc
![Probability and Statistics for Engineering and th…](https://www.bartleby.com/isbn_cover_images/9781305251809/9781305251809_smallCoverImage.gif)
Probability and Statistics for Engineering and th…
Statistics
ISBN:
9781305251809
Author:
Jay L. Devore
Publisher:
Cengage Learning
![Statistics for The Behavioral Sciences (MindTap C…](https://www.bartleby.com/isbn_cover_images/9781305504912/9781305504912_smallCoverImage.gif)
Statistics for The Behavioral Sciences (MindTap C…
Statistics
ISBN:
9781305504912
Author:
Frederick J Gravetter, Larry B. Wallnau
Publisher:
Cengage Learning
![Elementary Statistics: Picturing the World (7th E…](https://www.bartleby.com/isbn_cover_images/9780134683416/9780134683416_smallCoverImage.gif)
Elementary Statistics: Picturing the World (7th E…
Statistics
ISBN:
9780134683416
Author:
Ron Larson, Betsy Farber
Publisher:
PEARSON
![The Basic Practice of Statistics](https://www.bartleby.com/isbn_cover_images/9781319042578/9781319042578_smallCoverImage.gif)
The Basic Practice of Statistics
Statistics
ISBN:
9781319042578
Author:
David S. Moore, William I. Notz, Michael A. Fligner
Publisher:
W. H. Freeman
![Introduction to the Practice of Statistics](https://www.bartleby.com/isbn_cover_images/9781319013387/9781319013387_smallCoverImage.gif)
Introduction to the Practice of Statistics
Statistics
ISBN:
9781319013387
Author:
David S. Moore, George P. McCabe, Bruce A. Craig
Publisher:
W. H. Freeman