concentration of P in Si is 1.5x1o20 atoms/m3, and the predeposition heat treatment is conducted at 900°C for 55 minutes, with a constant concentration at the surface of 7x1026 P atoms/m3, calculate the diffusion time required for a junction depth of 1.7 µm. Consider that the drive-in treatment temperature is 1100°C. Use Qd and Do values of 4.10 eV and 2.39x10¯3 m²/s, respectively.

Introductory Circuit Analysis (13th Edition)
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ISBN:9780133923605
Author:Robert L. Boylestad
Publisher:Robert L. Boylestad
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Semiconductors can be used to sense
electrical activity of cells and tissues. During
the fabrication of semiconductors, doping (n-
type or p-type) can be done by diffusing
atoms into silicon wafers. Phosphorus atoms
can be used to produce a n-type
semiconductor. If the background
concentration of P in Si is 1.5x1020 atoms/m3,
and the predeposition heat treatment is
conducted at 900°C for 55 minutes, with a
constant concentration at the surface of
7x1026 P atoms/m³, calculate the diffusion
time required for a junction depth of 1.7 um.
Consider that the drive-in treatment
temperature is 1100°C. Use Qd and Do values
of 4.10 eV and 2.39x10-3 m²/s, respectively.
Transcribed Image Text:Semiconductors can be used to sense electrical activity of cells and tissues. During the fabrication of semiconductors, doping (n- type or p-type) can be done by diffusing atoms into silicon wafers. Phosphorus atoms can be used to produce a n-type semiconductor. If the background concentration of P in Si is 1.5x1020 atoms/m3, and the predeposition heat treatment is conducted at 900°C for 55 minutes, with a constant concentration at the surface of 7x1026 P atoms/m³, calculate the diffusion time required for a junction depth of 1.7 um. Consider that the drive-in treatment temperature is 1100°C. Use Qd and Do values of 4.10 eV and 2.39x10-3 m²/s, respectively.
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