As a designer, you are considering a switch from Al to Cu metal interconnects. Given the resistivity of copper, pcu = 2.2 µ-cm, and the resistivity of aluminum, pai = 3.6 µ-cm. for an interconnect with dimensions: w = 0.250 µm, t = 0.4 µm, 1 = 0.75 mm, and that the oxide thickness is the same as the interconnect thickness: tox = 0.4 µm, with permittivity &ox = 4.2 For each metal, compute the following: a. The sheet resistance Rs, b. The total resistance R, a. The parallel plate capacitance C

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As a designer, you are considering a switch from Al to Cu metal interconnects. Given the resistivity
of copper, pcu = 2.2 µ cm, and the resistivity of aluminum, pai = 3.6 µ£·cm. for an interconnect
with dimensions: w = 0.250
0.250 μm, t = 0.4 µm, 1 = 0.75 mm, and that the oxide thickness is the same as
the interconnect thickness: tox
0.4 μm,
with permittivity &ox = 4.2ɛ
=
For each metal, compute the following:
a. The sheet resistance Rs,
b. The total resistance R,
a. The parallel plate capacitance C
b. RC time constant for copper and aluminum.
T
c.
A company that has a Cu 8" x 0.250" sputtering target costs $1425, and an equivalently sized
Al target costs $430. If your project specifications required that interconnects of this size
have less than 50 ps delay, which metal would you select?
Transcribed Image Text:As a designer, you are considering a switch from Al to Cu metal interconnects. Given the resistivity of copper, pcu = 2.2 µ cm, and the resistivity of aluminum, pai = 3.6 µ£·cm. for an interconnect with dimensions: w = 0.250 0.250 μm, t = 0.4 µm, 1 = 0.75 mm, and that the oxide thickness is the same as the interconnect thickness: tox 0.4 μm, with permittivity &ox = 4.2ɛ = For each metal, compute the following: a. The sheet resistance Rs, b. The total resistance R, a. The parallel plate capacitance C b. RC time constant for copper and aluminum. T c. A company that has a Cu 8" x 0.250" sputtering target costs $1425, and an equivalently sized Al target costs $430. If your project specifications required that interconnects of this size have less than 50 ps delay, which metal would you select?
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