4. Source and drain regions of an n-MOS transistor are produced by ion implantation of phosphorus (1 x 1019 cm3) into a p-type Si substrate doped to a concentration of 5 x 1016 cm2. Find the junction capacitance per square micron for (a) zero-bias; (b) -3V reverse bias. (n = 1010/cm, &s = 11.9)

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4. Source and drain regions of an n-MOS transistor are produced by ion
implantation of phosphorus (1 x 1019 cm) into a p-type Si substrate doped to a
concentration of 5 x 1016 cm2. Find the junction capacitance per square micron
for (a) zero-bias; (b) -3V reverse bias.
(n = 101/cm3, Es = 11.9)
Transcribed Image Text:4. Source and drain regions of an n-MOS transistor are produced by ion implantation of phosphorus (1 x 1019 cm) into a p-type Si substrate doped to a concentration of 5 x 1016 cm2. Find the junction capacitance per square micron for (a) zero-bias; (b) -3V reverse bias. (n = 101/cm3, Es = 11.9)
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