EBK MANUFACTURING ENGINEERING & TECHNOL
EBK MANUFACTURING ENGINEERING & TECHNOL
7th Edition
ISBN: 8220100793431
Author: KALPAKJIAN
Publisher: PEARSON
bartleby

Concept explainers

bartleby

Videos

Textbook Question
Book Icon
Chapter 29, Problem 1RQ

Define MEMS, SIMPLE, SCREAM, and HEXSIL.

Expert Solution & Answer
Check Mark
To determine

Define MEMS, SIMPLE, SCREAM, and HEXSIL.

Explanation of Solution

MEMS:-

Micro-Electro-Mechanical Systems, or MEMS, is a technology that in its most mutual form can be separate as abridged mechanical and electro-mechanical elements that are completed using the method of micro-fabrication. The acute physical dimensions of MEMS devices can differ from fine below one micron on the lesser end of the dimensional spectrum, all the way to some millimeters.

SIMPLE:-

A supplementary to SCREAM is SIMPLE (silicon micromachining by single step plasma etching), as showed. This technique uses a chlorine gas-based plasma-etching process that machines p-doped or lightly doped silicon anisotropically, but intensely n-doped silicon isotropically.

SCREAM:-

Other method for creating very deep MEMS structures is the SCREAM(single-crystal silicon reactive etching and metallization) process, depicted in. In this technique, typical lithography and etching processes form trenches 10−50 μm (400−2000 μin.) deep, which are then sheltered by a layer of chemically vapor dropped silicon oxide.

HEXSIL

This process, revealed, links hexagonal honeycomb structures, silicon micromachining, and thin-film deposition to sort high-aspect-ratio, self-supporting structures. HEXSIL can make tall structures with the definition of shape those rivals of structures made by LIGA. In HEXSIL, a deep trench is first made in single-crystal silicon by dry etching, followed by shallow wet etching to create the evener trench walls.

Want to see more full solutions like this?

Subscribe now to access step-by-step solutions to millions of textbook problems written by subject matter experts!
Students have asked these similar questions
a) Determine state of stress at all points (a, b and c). These points are located on the exteriorsurface of the beam. Point a is located along the centreline of the beam, point b is 15mmfrom the centreline and point c is located on the edge of the beam. Present yourresults in a table and ensure that your sign convention is clearly shownb) Construct Mohrs circle at this point andcalculate the principal stresses and maximum in‐plane shear stress (τmax) at pointc. sketch the resulting state of stress at this point clearly indicating themagnitude of the stresses and any angles associated with the state of stress (principal ormaximum in‐plane shear).
parts e,f,g
Figure 9-6 9-49 An aluminum alloy plate with dimensions 20 cm x 10 cm × 2 cm needs to be cast with a secondary dendrite arm spacing of 10-2 cm (refer to Figure 9-6). What mold constant B is required (assume n = 2 )? Secondary dendrite arm spacing (cm) - 10-1 10-2 10-3 10 41 0.1 1 Copper Zinc alloys Aluminum alloys 10 100 1,000 10,000 100,000 Solidification time (s)

Chapter 29 Solutions

EBK MANUFACTURING ENGINEERING & TECHNOL

Knowledge Booster
Background pattern image
Mechanical Engineering
Learn more about
Need a deep-dive on the concept behind this application? Look no further. Learn more about this topic, mechanical-engineering and related others by exploring similar questions and additional content below.
Similar questions
SEE MORE QUESTIONS
Recommended textbooks for you
Text book image
Precision Machining Technology (MindTap Course Li...
Mechanical Engineering
ISBN:9781285444543
Author:Peter J. Hoffman, Eric S. Hopewell, Brian Janes
Publisher:Cengage Learning
Material Properties 101; Author: Real Engineering;https://www.youtube.com/watch?v=BHZALtqAjeM;License: Standard YouTube License, CC-BY