Si cantilever metal layer polySi heater Figure 2: Top view of the thermal bimorph cantilever structure showing the cantilever, metal layer, and poly§i heater layers in no particular order
Si cantilever metal layer polySi heater Figure 2: Top view of the thermal bimorph cantilever structure showing the cantilever, metal layer, and poly§i heater layers in no particular order
Power System Analysis and Design (MindTap Course List)
6th Edition
ISBN:9781305632134
Author:J. Duncan Glover, Thomas Overbye, Mulukutla S. Sarma
Publisher:J. Duncan Glover, Thomas Overbye, Mulukutla S. Sarma
Chapter3: Power Transformers
Section: Chapter Questions
Problem 3.7MCQ: Consider Figure 3.5. Match the following, those on the left to those on the right. (i) Im (a)...
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Transcribed Image Text:Si cantilever
metal layer
polySi heater
Figure 2: Top view of the thermal bimorph cantilever structure showing
the cantilever, metal layer, and poly§i heater layers in no particular order
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