In 1990, Song et al published a paper showing that the DC self-bias potential Vpc is a function of the amplitude of the driving RF voltage |VrF| and the area of the driven Aa and grounded electrodes A, respectively. They found: (Ag – Ad Ag + Aa, Voc = |VRF| sin If (VRF = 500 V and Ag =3Ag calculate both Vpc and the maximum possible value of the time-dependent plasma potential V.

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In 1990, Song et al published a paper showing that the DC self-bias
potential VDc is a function of the amplitude of the driving RF voltage
|VRF| and the area of the driven Ag and grounded electrodes A,
respectively. They found:
Voc = |VRF| sin
(A, – Ad
\Ag + Aa)
If |VRF| = 500 V and A =3A4 calculate both Vpc and the maximum
possible value of the time-dependent plasma potential Vp.
Transcribed Image Text:In 1990, Song et al published a paper showing that the DC self-bias potential VDc is a function of the amplitude of the driving RF voltage |VRF| and the area of the driven Ag and grounded electrodes A, respectively. They found: Voc = |VRF| sin (A, – Ad \Ag + Aa) If |VRF| = 500 V and A =3A4 calculate both Vpc and the maximum possible value of the time-dependent plasma potential Vp.
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