Determine the time in seconds required to sputter 50 nm of Si using a 10 µA/cm2 beam of 45 keV ions of (a) Ne, (b) Kr, and (c) Xe.

Fundamentals Of Analytical Chemistry
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ISBN:9781285640686
Author:Skoog
Publisher:Skoog
Chapter31: Introduction To Analytical Separations
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Determine the time in seconds required to sputter 50 nm of Si using a 10 µA/cm2 beam of 45 keV ions of (a) Ne, (b) Kr, and (c) Xe.
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