Annealing is a critical process in semiconductor manufacturing where silicon wafers get rapidly heated to get temperatures using powerful infrared heaters. Annealing helps to reduce defects in materials after implantation or deposition processes. You have been asked to design a temperature sensor an annealer with a range of up to 1500°C.Select a suitable thermocouple from the table below and give an explanation for your choice.

Elements Of Electromagnetics
7th Edition
ISBN:9780190698614
Author:Sadiku, Matthew N. O.
Publisher:Sadiku, Matthew N. O.
ChapterMA: Math Assessment
Section: Chapter Questions
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Annealing is a critical process in semiconductor manufacturing where silicon wafers
get rapidly heated to get temperatures using powerful infrared heaters. Annealing
helps to reduce defects in materials after implantation or deposition processes.
a) You have been asked to design a temperature sensor an annealer with a range of up
to 1500°C.Select a suitable thermocouple from the table below and give an
explanation for your choice.
80
E
70
60
K
50
40
-C
30
20
10
0.
500
1000
1500
2000 2500
Temperature ("C)
b) To record the temperature, you use a microcontroller with an ADC. The ADC is
referenced to a 2.048V reference voltage source. To make use of the entire range of
the ADC, what gain does the amplifier require for your chosen Thermocouple?
c) You want to read the temperature with a resolution of 0.5°C. What is the minimum
number of bits that your ADC requires?
d) The thermocouple has a time constant, t, of 300ms. If the annealer heats from room
temperature (20°C) to 820°C. What equation describes this system? how long would
the thermocouple need to read a temperature of 812°C?
Thermocouple Output Voltage (mV)
Transcribed Image Text:Annealing is a critical process in semiconductor manufacturing where silicon wafers get rapidly heated to get temperatures using powerful infrared heaters. Annealing helps to reduce defects in materials after implantation or deposition processes. a) You have been asked to design a temperature sensor an annealer with a range of up to 1500°C.Select a suitable thermocouple from the table below and give an explanation for your choice. 80 E 70 60 K 50 40 -C 30 20 10 0. 500 1000 1500 2000 2500 Temperature ("C) b) To record the temperature, you use a microcontroller with an ADC. The ADC is referenced to a 2.048V reference voltage source. To make use of the entire range of the ADC, what gain does the amplifier require for your chosen Thermocouple? c) You want to read the temperature with a resolution of 0.5°C. What is the minimum number of bits that your ADC requires? d) The thermocouple has a time constant, t, of 300ms. If the annealer heats from room temperature (20°C) to 820°C. What equation describes this system? how long would the thermocouple need to read a temperature of 812°C? Thermocouple Output Voltage (mV)
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