Concept explainers
Define MEMS, SIMPLE, SCREAM, and HEXSIL.
Define MEMS, SIMPLE, SCREAM, and HEXSIL.
Explanation of Solution
MEMS:-
Micro-Electro-Mechanical Systems, or MEMS, is a technology that in its most mutual form can be separate as abridged mechanical and electro-mechanical elements that are completed using the method of micro-fabrication. The acute physical dimensions of MEMS devices can differ from fine below one micron on the lesser end of the dimensional spectrum, all the way to some millimeters.
SIMPLE:-
A supplementary to SCREAM is SIMPLE (silicon micromachining by single step plasma etching), as showed. This technique uses a chlorine gas-based plasma-etching process that machines p-doped or lightly doped silicon anisotropically, but intensely n-doped silicon isotropically.
SCREAM:-
Other method for creating very deep MEMS structures is the SCREAM(single-crystal silicon reactive etching and metallization) process, depicted in. In this technique, typical lithography and etching processes form trenches 10−50 μm (400−2000 μin.) deep, which are then sheltered by a layer of chemically vapor dropped silicon oxide.
HEXSIL
This process, revealed, links hexagonal honeycomb structures, silicon micromachining, and thin-film deposition to sort high-aspect-ratio, self-supporting structures. HEXSIL can make tall structures with the definition of shape those rivals of structures made by LIGA. In HEXSIL, a deep trench is first made in single-crystal silicon by dry etching, followed by shallow wet etching to create the evener trench walls.
Want to see more full solutions like this?
Chapter 29 Solutions
Manufacturing Engineering & Technology
- In 1907 a janitor called Murray Spangler put together a pillowcase. a fan, an old biscuit tin and a broom handle. It was the world's first vacuum cleaner_ One year later he sold his patented idea to William Hoover whose company wont on to dominate the vacuum cleaner market for decades. especially in its United States homeland. Yet between 2002 and 2005 Hoover's market share dropped from 36 per cent to 13.5 per cent, Why? Because a futuristic looking and comparatively expensive rival product, the Dyson vacuum cleaner, had jumped from nothing to over 20 per cent of the market. In fact, the Dyson produce dales back to 1978 when James Dyson noticed how the air filter in the sprayfnishing room of a company when; he had been working was constantly clogging with powder particles (just like a vacuum cleaner bag clogs with dust). So he designed and built an industrial cyclone lower, which removed the powder particles by exerting centrifugal forces. Thy question intriguing him was, could the…arrow_forwardWhat is DFX? Define and enlist the aspects of its vision in the engineering design process.arrow_forwardDifferentiate among 3D transformation for translation, rotation and scaling in computer graphics?arrow_forward
- What are the advantages of Matrix organization?arrow_forward[2.2] Consider two different implementations of the same instruction set architecture. instructions can be divided into four classes according to their CPI (classes A, B, C, and D with a clock rate of 2.5 GHz and CPIs of 1, 2, 3, and 3, and P2 with a clock rate of 3 GHz CPIs of 2, 2, 2, and 2. Given a program with a dynamic instruction count of 1.0E6 instruc divided into classes as follows: 10% class A, 20% class B, 50% class C, and 20% cla which is faster: P1 or P2? a. What is the global CPI for each implementation? Ans. 2.6, 2.0 b. Find the clock cycles required in both cases. Ans. 26 x 105, 20 × 10³arrow_forwardWhat are the hardware implementations needed for making a 'Smart Walking Stick' for the blind? Could you please list them?arrow_forward
- Differentiate PSDS and MSDS and explain why do we need to have these documentsarrow_forwardDescribe the working principles of the AM-3DP systems: FDM, SLA, SLS, SLM or DMLS, DLP, MJ &BJ, EBM.arrow_forwardFigure below shows a MEMS released device. Develop a process sequence for fabrication of this device. You may choose materials (metal types, insulators) but you have to use a compatible fabrication sequence for the whole process.arrow_forward
- Precision Machining Technology (MindTap Course Li...Mechanical EngineeringISBN:9781285444543Author:Peter J. Hoffman, Eric S. Hopewell, Brian JanesPublisher:Cengage Learning