What is bulk micromachining? For which MEMS
Elements Of Electromagnetics
7th Edition
ISBN:9780190698614
Author:Sadiku, Matthew N. O.
Publisher:Sadiku, Matthew N. O.
ChapterMA: Math Assessment
Section: Chapter Questions
Problem 1.1MA
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What is bulk micromachining? For which MEMS applications is it used for and on what material(s)? Give examples of materials and techniques used to bulk-micromachine. Provide a process flow diagram of a fabrication process for a sample MEMS device that uses bulk micromachining technique
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