Answered: The photoresist thickness is one the…

MATLAB: An Introduction with Applications

6th Edition

ISBN:9781119256830

Author:Amos Gilat

Publisher:Amos Gilat

Chapter1: Starting With Matlab

Section: Chapter Questions

Problem 1P

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The photoresist thickness is one the quality characteristic in integrate circuits. A new process has been developed for applying photoresist to 125-mm silicon wafers used in manufacturing integrated circuits. Twelve wafers were tested, and the following photoresist thickness measurements were observed: 13.3987, 13.3957, 13.3902, 13.4015, 13.4001, 13.3918, 13.3965, 13.3925, 13.3946, 13.3939, 13.4005 and 13.4002. Assume that thickness is normally distributed.

a) Test the hypothesis that mean thickness is 13.4x1000 Å. Use a=0.05 and assume a two-sided alternative.

b) Find a 99% two-sided confidence interval on mean photoresist thickness.

c) Find a 95% two-sided confidence interval on standard deviation of photoresist thickness.

Definition Definition Measure of central tendency that is the average of a given data set. The mean value is evaluated as the quotient of the sum of all observations by the sample size. The mean, in contrast to a median, is affected by extreme values. Very large or very small values can distract the mean from the center of the data. Arithmetic mean: The most common type of mean is the arithmetic mean. It is evaluated using the formula: μ = 1 N ∑ i = 1 N x i Other types of means are the geometric mean, logarithmic mean, and harmonic mean. Geometric mean: The nth root of the product of n observations from a data set is defined as the geometric mean of the set: G = x 1 x 2 ... x n n Logarithmic mean: The difference of the natural logarithms of the two numbers, divided by the difference between the numbers is the logarithmic mean of the two numbers. The logarithmic mean is used particularly in heat transfer and mass transfer. ln x 2 − ln x 1 x 2 − x 1 Harmonic mean: The inverse of the arithmetic mean of the inverses of all the numbers in a data set is the harmonic mean of the data. 1 1 x 1 + 1 x 2 + ...

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