The parabolic rate coefficient at 1200 °C wet oxidation is 0.920 μm²/hr. If it took 120 minutes to grow the initial oxide, for how long (in hours) should the wafer be subjected to another oxidation process to grow an 25000 Aº thick oxide?

Fundamentals Of Analytical Chemistry
9th Edition
ISBN:9781285640686
Author:Skoog
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Chapter23: Voltammetry
Section: Chapter Questions
Problem 23.14QAP
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2. The parabolic rate coefficient at 1200 °C wet oxidation is 0.920 μm²/hr. If it
took 120 minutes to grow the initial oxide, for how long (in hours) should
the wafer be subjected to another oxidation process to grow an 25000 Aº
thick oxide?
Transcribed Image Text:2. The parabolic rate coefficient at 1200 °C wet oxidation is 0.920 μm²/hr. If it took 120 minutes to grow the initial oxide, for how long (in hours) should the wafer be subjected to another oxidation process to grow an 25000 Aº thick oxide?
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