Answered: side a bell jar, and chemical vapors…

MATLAB: An Introduction with Applications

6th Edition

ISBN:9781119256830

Author:Amos Gilat

Publisher:Amos Gilat

Chapter1: Starting With Matlab

Section: Chapter Questions

Problem 1P

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please show the complete process and solution (minitab)

A basic processing step is to grow an epitaxial layer on polished silicon wafers. The wafers mounted on a susceptor are positioned inside a bell jar, and chemical vapors are introduced. The susceptor is rotated and heat is applied until the epitaxial layer is thick enough. An experiment was run using two factors: arsenic flow rate (A) and deposition time (B). Four replicates were run, and the epitaxial layer thickness was measured (in mm). The data are shown below:

			Replicates			factors	Levels
A	B	I	II	III	IV		Low (-)	High (+)
-	-	14.037	16.165	13.972	13.907	A	55%	59%
+	-	13.88	13.86	14.032	13.914
-	+	14.821	14.757	14.843	14.878	B	Short	Long
+	+	14.888	14.921	14.415	14.932		(10mins)	(15mins)

Which effects appear to be large? Use the analysis of variance to confirm your conclusions.
Provide the regression model based on the results of this experiment.

F_{table(α=0.1)}= 3.17655

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