4. Determine the mass of a Si proof mass 400µm by 400um by 1.0um thick. If such a mass were suspended from a fixed free cantilever of length 400um thickness 1um and width 10µm (see exercise 3) what would be the resonant frequency of the system? If the beam and proof mass were used as an accelerometer what would the sensitivity be? Answer in nm per g. (Density Si 2300Kgm³)
4. Determine the mass of a Si proof mass 400µm by 400um by 1.0um thick. If such a mass were suspended from a fixed free cantilever of length 400um thickness 1um and width 10µm (see exercise 3) what would be the resonant frequency of the system? If the beam and proof mass were used as an accelerometer what would the sensitivity be? Answer in nm per g. (Density Si 2300Kgm³)
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Transcribed Image Text:4. Determine the mass of a Si proof mass 400µm by 400um by 1.0um thick. If such a mass
were suspended from a fixed free cantilever of length 400um thickness 1um and width
10um (see exercise 3) what would be the resonant frequency of the system? If the beam
and proof mass were used as an accelerometer what would the sensitivity be? Answer in
nm per g. (Density Si 2300Kgm³)
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