Pre-Lab Report Exercise EELE407 Oxidation Experiment to determine model coefficients. The following data was obtained in a Wet O₂ process at 1000 °C. Time (hours) Oxide thickness (microns) 01234567% α 0.00 0.30 0.50 0.67 0.81 0.94 1.06 1.17 8 1.27 9 10 1.37 1.46 1. Plot the Oxide thickness on the y-axis and time on the x-axis. 2. Plot the Oxide thickness on the y-axis and time/Oxide thickness on the x-axis. 3. Do a linear fit to the plot of 2. Extract the slope and the y intercept. 4. Use the slope and intercept to find A, B and B/A in the Grove-Deal Model. 5. Compare these to the values found using: a. B: Do = 224 μ²/hr EA = 0.71 eV b. B/A: Do = 5.33x107 μ/hr EA = 2.05 eV 6. Plot the Oxide thickness vs Oxidation Time using the results of 5. Increment the oxide thickness by 0.01 microns from 0 to 2.0 microns.

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Pre-Lab Report Exercise
EELE407 Oxidation Experiment to determine model coefficients. The following data was obtained in a
Wet O₂ process at 1000 °C.
Time (hours)
Oxide thickness (microns)
01234567% α
0.00
0.30
0.50
0.67
0.81
0.94
1.06
1.17
8
1.27
9
10
1.37
1.46
1. Plot the Oxide thickness on the y-axis and time on the x-axis.
2. Plot the Oxide thickness on the y-axis and time/Oxide thickness on the x-axis.
3. Do a linear fit to the plot of 2. Extract the slope and the y intercept.
4. Use the slope and intercept to find A, B and B/A in the Grove-Deal Model.
5. Compare these to the values found using:
a. B:
Do = 224 μ²/hr
EA = 0.71 eV
b. B/A:
Do = 5.33x107 μ/hr
EA = 2.05 eV
6. Plot the Oxide thickness vs Oxidation Time using the results of 5. Increment the oxide thickness
by 0.01 microns from 0 to 2.0 microns.
Transcribed Image Text:Pre-Lab Report Exercise EELE407 Oxidation Experiment to determine model coefficients. The following data was obtained in a Wet O₂ process at 1000 °C. Time (hours) Oxide thickness (microns) 01234567% α 0.00 0.30 0.50 0.67 0.81 0.94 1.06 1.17 8 1.27 9 10 1.37 1.46 1. Plot the Oxide thickness on the y-axis and time on the x-axis. 2. Plot the Oxide thickness on the y-axis and time/Oxide thickness on the x-axis. 3. Do a linear fit to the plot of 2. Extract the slope and the y intercept. 4. Use the slope and intercept to find A, B and B/A in the Grove-Deal Model. 5. Compare these to the values found using: a. B: Do = 224 μ²/hr EA = 0.71 eV b. B/A: Do = 5.33x107 μ/hr EA = 2.05 eV 6. Plot the Oxide thickness vs Oxidation Time using the results of 5. Increment the oxide thickness by 0.01 microns from 0 to 2.0 microns.
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