Out of focus In focus Figure 4 K21 DOF = 2(NA)² Equation 1 One of the Figure of Merit (FoM) in optical photolithography process is Depth of Focus (DoF). Explain DoF by relating between Figure 4 and Equation 1.

Introductory Circuit Analysis (13th Edition)
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ISBN:9780133923605
Author:Robert L. Boylestad
Publisher:Robert L. Boylestad
Chapter1: Introduction
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Focus
Analyzing maguet
Neutral
0-200kev
X&Y
trap
sean
plates
Wafer
Accelerator
Pump
Neutral
beam gate
Resolving
aperature
0-30kev
Faraday eup
lon
source
Figure 3
[Rajah 3]
Transcribed Image Text:Focus Analyzing maguet Neutral 0-200kev X&Y trap sean plates Wafer Accelerator Pump Neutral beam gate Resolving aperature 0-30kev Faraday eup lon source Figure 3 [Rajah 3]
Out of focus
In focus
Figure 4
K21
DOF =
Equation 1
2(NA)²
1)
One of the Figure of Merit (FoM) in optical photolithography process is Depth of Focus
(DoF). Explain DoF by relating between Figure 4 and Equation 1.
Transcribed Image Text:Out of focus In focus Figure 4 K21 DOF = Equation 1 2(NA)² 1) One of the Figure of Merit (FoM) in optical photolithography process is Depth of Focus (DoF). Explain DoF by relating between Figure 4 and Equation 1.
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