m. Calculate th resolution

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Using an optical system whose focal length equals to the diameter of lens and
K=0.6 in the air as shown in figure we will pattern the 500nm x 500 nm through
the photoresist thickness of 1um. Calculate the max. allowable wavelength of
optical system for the minimum resolution
f
Transcribed Image Text:Using an optical system whose focal length equals to the diameter of lens and K=0.6 in the air as shown in figure we will pattern the 500nm x 500 nm through the photoresist thickness of 1um. Calculate the max. allowable wavelength of optical system for the minimum resolution f
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