Ion electron clouds 100-200 Kev Silicon wafer The ion distribution into the silicon can be approximated to first order by the Gaussian form as: 2 1/x-Rp) ARp Nion (x): = Nye a) Assuming the above equation holds good for defining the doping profile of the penetrated ions, discuss the impact of enhancing the straggle to i)'infinity' and ii) "zero' on the penetrated ions to the depth of 'x'. Also discuss upon which factors Non (x) shall depend. b) Defend or justify otherwise whether this doping process is better than the conventional chemical doping process or not, with respect to certain attributes.

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Q1. The following diagram shows the ion stopping process as a result of the ion implantation
method of doping.
Silicon nuclei
Ion
electron clouds
100-200 Kev
Silicon wafer
The ion distribution into the silicon can be approximatedto first order by the Gaussian form as:
2
1/x-Rp)
ARp
Non (x) = Npe
a) Assuming the above equation holds good for defining the doping profile of the penetrated
ions, discuss the impact of enhancing the straggle to i)'infinity' and ii) 'zero' on the
penetrated ions to the depth of 'x'. Also discuss upon which factors Non (x) shall depend.
b) Defend or justify otherwise whether this doping process is better than the conventional
chemical doping process or not, with respect to certain attributes.
Transcribed Image Text:Q1. The following diagram shows the ion stopping process as a result of the ion implantation method of doping. Silicon nuclei Ion electron clouds 100-200 Kev Silicon wafer The ion distribution into the silicon can be approximatedto first order by the Gaussian form as: 2 1/x-Rp) ARp Non (x) = Npe a) Assuming the above equation holds good for defining the doping profile of the penetrated ions, discuss the impact of enhancing the straggle to i)'infinity' and ii) 'zero' on the penetrated ions to the depth of 'x'. Also discuss upon which factors Non (x) shall depend. b) Defend or justify otherwise whether this doping process is better than the conventional chemical doping process or not, with respect to certain attributes.
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