An area-variation-based capacitive accelerometer, as shown in Figure below, has the following parameters: finger length I₁ = 300 μm, mass length Im = 280 μm, number of fingers n = 100, air gap df = 1 µm, and the relative permittivity &r= 7. If the measured capacitance change AC is 50.34 pF, find the angel in degrees (o) Anchor Beam Beam Anchor ♫7. Support posts Mass Mass fingers F=ma Glass substrate Fixed fingers

Elements Of Electromagnetics
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Author:Sadiku, Matthew N. O.
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An area-variation-based capacitive accelerometer, as shown in Figure
below, has the following parameters:finger length If= 300 µm, mass length
Im = 280 µm, numberof fingers n = 100, air gap dr = 1 um, and the relative
permittivity ɛr= 7. If the measured capacitance change AC is 50.34 pF, find
the angel 0 in degrees (o)
Anchor
Beam
Beam
Anchor
Mass
F= mã
Fixed
Support
posts
Mass
fingers
fingers
Glass substrate
Transcribed Image Text:An area-variation-based capacitive accelerometer, as shown in Figure below, has the following parameters:finger length If= 300 µm, mass length Im = 280 µm, numberof fingers n = 100, air gap dr = 1 um, and the relative permittivity ɛr= 7. If the measured capacitance change AC is 50.34 pF, find the angel 0 in degrees (o) Anchor Beam Beam Anchor Mass F= mã Fixed Support posts Mass fingers fingers Glass substrate
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