HW -31. An article in Solid State Technology ("Orthogonal Design for Process Optimization and Its Application in PlasmaEtching," May 1987, pp. 127–132) describes the application of factorial designs in developing a nitride etchprocess on a single-wafer plasma etcher. The process uses C2F6 as the reactant gas. It is possible to vary the gasflow, the power applied to the cathode, the pressure in the reactor chamber, and the spacing between theanode and the cathode (gap). Several response variables would usually be of interest in this process, but in thisexample we will concentrate on etch rate for silicon nitride. Perform an appropriate experiment to characterizethe performance of this etching process with respect to the four process variables.DesignFactorGapAPressureC;F, Flow PowerLevel(сm)(m Torr)(SCCM)(W)Low (-) 0.80High (+) 1.202753254501255502002. To illustrate the use of a one-half fraction, consider the plasma etch experiment. An article in Solid StateTechnology ("Orthogonal Design for Process Optimization and Its Application in Plasma Etching," May 1987, pp.127-132) describes the application of factorial designs in developing a nitride etch process on a single-waferplasma etcher. The process uses C2F6 as the reactant gas. It is possible to vary the gas flow, the power appliedto the cathode, the pressure in the reactor chamber, and the spacing between the anode and the cathode (gap).Several response variables would usually be of interest in this process, but in this example, we will concentrateon etch rate for silicon nitride. Perform an appropriate experiment to characterize the performance of thisetching process with respect to the four process variables. Suppose we had decided to use a 24-1 design with I =ABCD to investigate the four factors gap (A), pressure (B), C2F6 flow rate (C), and power setting (D). Set up thisdesign and analyze it using only the data from the full factorial that corresponds to the runs in the fraction.C„F, FlowDesignFactorLevelGapPressurePowerD(cm)(m Torr)(SCCM)(W)Low (-) 0.80450125275High (+) 1.205502003253. An accounting firm uses sampling methods in its client auditing processes. Accounts of a particular type aregrouped together in a batch size of 25. The auditor is concerned about erroneous accounts escaping the auditingprocess. Sampling and auditing the accounts is time consuming and very expensive, and a random sample of sizen= 5 is about the largest sample that can practically be used. Suppose that the batch of accounts contains oneerroneous account. What is the probability that the sample that is selected contains the erroneous account?4. Hospital personnel routinely examine patient records for error, such as incomplete insurance information, onincomplete patient history, or missing/incomplete medical records. On average, about 250 new patients areadmitted each day. Historically, about 5% of these records have contained errors. If a random sample of 50 newpatient records is checked each day, what is the probability that this sample will contain at least one patientrecord with missing information?

An accounting firm uses sampling methods in its client auditing processes. Accounts of a particular type are grouped together in a batch size of 25. The auditor is concerned about erroneous accounts escaping the auditing process. Sampling and auditing the accounts is time consuming and very expensive, and a random sample of size n= 5 is about the largest sample that can practically be used. Suppose that the batch of accounts contains one erroneous account. What is the probability that the sample that is selected contains the erroneous account?

An accounting firm uses sampling methods in its client auditing processes. Accounts of a particular type are grouped together in a batch size of 25. The auditor is concerned about erroneous accounts escaping the auditing process. Sampling and auditing the accounts is time consuming and very expensive, and a random sample of size n= 5 is about the largest sample that can practically be used. Suppose that the batch of accounts contains one erroneous account. What is the probability that the sample that is selected contains the erroneous account?

A First Course in Probability (10th Edition)

10th Edition

ISBN:9780134753119

Author:Sheldon Ross

Publisher:Sheldon Ross

Chapter1: Combinatorial Analysis

Section: Chapter Questions

Problem 1.1P: a. How many different 7-place license plates are possible if the first 2 places are for letters and...

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