After following all the steps in the photolithography, a student found that the size of the pattern obtained on the photoresist is slightly bigger compared to the size of the pattern on the mask. What could be the two (2) reasons behind this issue?
Compton effect
The incoming photons' energy must be in the range of an X-ray frequency to generate the Compton effect. The electron does not lose enough energy that reduces the wavelength of scattered photons towards the visible spectrum. As a result, with visible lights, the Compton effect is missing.
Recoil Velocity
The amount of backward thrust or force experienced by a person when he/she shoots a gun in the forward direction is called recoil velocity. This phenomenon always follows the law of conservation of linear momentum.
Please provide Handwritten answer.
8. After following all the steps in the photolithography, a student found that the size of the pattern obtained on the photoresist is slightly bigger compared to the size of the pattern on the mask. What could be the two (2) reasons behind this issue? *
A) the student used longer exposure time during alignment and exposure step
B) the student used slower spin speed during spin coating producing thicker photoresists
C) the student used longer development time during the development step
D) the student used lower temperature and shorter baking time during the pre bake step
E) the student misaligned the mask with the wafer during the alignment step
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