Answered: (a) Does the C2F6 flow rate affect the…

Chemistry

10th Edition

ISBN:9781305957404

Author:Steven S. Zumdahl, Susan A. Zumdahl, Donald J. DeCoste

Publisher:Steven S. Zumdahl, Susan A. Zumdahl, Donald J. DeCoste

Chapter1: Chemical Foundations

Section: Chapter Questions

Problem 1RQ: Define and explain the differences between the following terms. a. law and theory b. theory and...

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An article in Solid State Technology, "Orthogonal Design of Process Optimization and Its Application to Plasma Etching" by G.Z. Yin and D.W. Jillie (May, 1987) describes an experiment to determine the effect of C₂F₆ flow rate on the uniformity of the etch on a silicon wafer used in integrated circuit manufacturing. Data for two flow rates are as follows:

C₂F₆	Uniformity Observation
(SCCM)	1	2	3	4	5	6
125	2.7	4.6	2.6	3.0	3.2	3.8
200	4.6	3.4	2.9	3.5	4.1	5.1

(a) Does the C₂F₆ flow rate affect the wafer-to-wafer variability in etch uniformity? Use = 0.05.

(b) Draw box plots to assist in the interpretation of the data from this experiment

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