A cantilever beam has length, L 150 um; width, w 10 um; thickness, t 15 um; density, p= 2330 kg/m'; damping coefficient, b 3 x 10 Ns/m; and modulus of elasticity, EM= 1.5 x 10" N/m. In this micro-electro-mechanical (MEMS) device, the spring constant, k, of a rectangular cantilever beam is given by: k = (E,wt³)/(4L') a. What is the beam's damped resonance frequency, fres (Hz)? (Do not forget: men= 0.24*m for a cantilever beam in the question for damped resonance frequency). b. What is the quality factor? c. Can we detect a mass of 200 pg (picogram) added to the cantilever beam? (Note: I pg - 1015 kg)?
A cantilever beam has length, L 150 um; width, w 10 um; thickness, t 15 um; density, p= 2330 kg/m'; damping coefficient, b 3 x 10 Ns/m; and modulus of elasticity, EM= 1.5 x 10" N/m. In this micro-electro-mechanical (MEMS) device, the spring constant, k, of a rectangular cantilever beam is given by: k = (E,wt³)/(4L') a. What is the beam's damped resonance frequency, fres (Hz)? (Do not forget: men= 0.24*m for a cantilever beam in the question for damped resonance frequency). b. What is the quality factor? c. Can we detect a mass of 200 pg (picogram) added to the cantilever beam? (Note: I pg - 1015 kg)?
Chapter2: Loads On Structures
Section: Chapter Questions
Problem 1P
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Transcribed Image Text:A cantilever beam has length, L 150 um; width, w 10 um; thickness, t 15 µm;
density, p= 2330 kg/m'; damping coefficient, b 3 x 10 Ns/m; and modulus of elasticity, EM =
1.5 x 10" N/m?. In this micro-electro-mechanical (MEMS) device, the spring constant, k, of a
rectangular cantilever beam is given by: k = (EMwt)/(4L³)
a. What is the beam's damped resonance frequency, fres (Hz)? (Do not forget: ment=0.24*m for a
cantilever beam in the question for damped resonance frequency).
b. What is the quality factor?
c. Can we detect a mass of 200 pg (picogram) added to the cantilever beam?
(Note: 1 pg 1015 kg)?
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