1. What is the most common photoresist used in IC photolithography? ( ) a.negative photoresist b.positive i-line photoresist c.negative i-line photoresist d.high speed color chrome 2. Which of the following is not a common production tool in the thin films area? ( ) a.plasma resist stripper b.CVD systems c. PVD systems d.rapid thermal anneal system e.sputtering system f.spin-on-glass dispense system 3.The purpose of hard bake is to ( ) a.evaporate any residual solvent b.harden the resist c.improve resist adhesion to the substrate d.all of the above

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1. What is the most common photoresist used in IC
photolithography? ( )
a.negative photoresist
b.positive i-line photoresist
c.negative i-line photoresist
d.high speed color chrome
2. Which of the following is not a common
production tool in the thin films area? ( )
a.plasma resist stripper
b.CVD systems
c. PVD systems
d.rapid thermal anneal system
e.sputtering system
f.spin-on-glass dispense system
3.The purpose of hard bake is to ( )
a.evaporate any residual solvent
b.harden the resist
c.improve resist adhesion to the substrate
d.all of the above
4.The purpose of the contanct formation process is
to ()
a.insulate all exposed silicon areas of the wafer.
b.form metal contacts on all active areas of the
silicon.
c.create barriers for charge carriers between
transistors
d.form metal contacts on all exposed areas of
silicon dioxide.
5.What is the purpose of photolithography? ()
a.to etch a permanent pattern into the wafer
b.to transfer the image of a circuit pattern directly
onto a resist-coated wafer
c.to create a bottleneck in the wafer process flow
d.to implant ions into selected areas of the wafer
6. What is the purpose of the etch process?
a. To coat the wafer with photoresist and then
develop the resist after exposure
b.To diffuse dopant into the silicon through
openings in photoresist.
c. To produce a termporary pattern on the wafer in
areas not protected by photoresist
d.To selectively remove material from areas not
protected by photoresist.
Transcribed Image Text:1. What is the most common photoresist used in IC photolithography? ( ) a.negative photoresist b.positive i-line photoresist c.negative i-line photoresist d.high speed color chrome 2. Which of the following is not a common production tool in the thin films area? ( ) a.plasma resist stripper b.CVD systems c. PVD systems d.rapid thermal anneal system e.sputtering system f.spin-on-glass dispense system 3.The purpose of hard bake is to ( ) a.evaporate any residual solvent b.harden the resist c.improve resist adhesion to the substrate d.all of the above 4.The purpose of the contanct formation process is to () a.insulate all exposed silicon areas of the wafer. b.form metal contacts on all active areas of the silicon. c.create barriers for charge carriers between transistors d.form metal contacts on all exposed areas of silicon dioxide. 5.What is the purpose of photolithography? () a.to etch a permanent pattern into the wafer b.to transfer the image of a circuit pattern directly onto a resist-coated wafer c.to create a bottleneck in the wafer process flow d.to implant ions into selected areas of the wafer 6. What is the purpose of the etch process? a. To coat the wafer with photoresist and then develop the resist after exposure b.To diffuse dopant into the silicon through openings in photoresist. c. To produce a termporary pattern on the wafer in areas not protected by photoresist d.To selectively remove material from areas not protected by photoresist.
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