MICROLEECTRONIC E BOOKS
MICROLEECTRONIC E BOOKS
null Edition
ISBN: 9780190853532
Author: SEDRA
Publisher: OXF
Question
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Chapter 5, Problem 5.1P
To determine

The area and dimensions (width and length) of the given capacitor which is fabricated using MOS technology.

Expert Solution & Answer
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Answer to Problem 5.1P

  For,tox1=1nmArea=2.89×1010m2W=L=17μmFor,tox2=10nmArea=0.289×1010m2W=L=5.37μm

Explanation of Solution

Given:

   ( t OX ) 1 =1nm ( t OX ) 2 =10nm C=10pF

Calculation:

Case 1:

  tox1=1nm

Although formula oxide capacitance which is the quotient of permittivity of the silicon dioxide and oxide thickness is given by

  Cox=εoxtoxCox=3.9ε0toxpluggingvaluesCox=3.9×8.854×10121×109Cox=34.53×103F/m2

Although,

  C=CoxWLwhere, W= channel width, L = channel length, C= total capacitanceHence,WL=CCoxso,WL=10×101234.43×103WL=2.89×1010m2

Now, take square root from W · L in order to get channel width and channel length.

  W=L=2.89×1010W=L=1.70×105W=L=17μm

Case 2:

  tox2=10nm

Although formula oxide capacitance which is the quotient of permittivity of the silicon dioxide and oxide thickness is given by:

  Cox=εoxtoxCox=3.9ε0toxpluggingvaluesCox=3.9×8.854×101210×109Cox=3.453×103F/m2

Although,

  C=CoxWLwhere, W= channel width, L = channel length, C= total capacitanceHence,WL=CCoxso,WL=10×10123.443×103WL=0.289×1010m2

Now take square root from W · L in order to get channel width and channel length

  W=L=0.289×1010W=L=0.537×105W=L=5.37μm

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