What is the area ratio between a 300mm and 200mm diameter wafer? (The 300mm diameter wafer has x.xx times the area of a 200mm). b) How many 15x15mm die can be completely printed on a 100mm, 200mm, and 300mm wafer? Show your work. Do not include partial fields; you may assume no scribe lines or edge exclusion zone. There is no flat, only a notch for the 200mm and 300mm wafers. How many times more die can you get when going from 200 to 300mm wafers? How does this number compare to the area increase between 200 and 300mm? c) Now assume a 100um scribe line and a 3mm edge exclusion zone. How may die per wafer for 200mm and 300mm wafers? How did you calculate this – show your work. How does this compare to the area ratio? Is it the same? If not, why not?
Q1 – Area vs Die/wafer –
a) What is the area ratio between a 300mm and 200mm diameter wafer? (The 300mm diameter wafer
has x.xx times the area of a 200mm).
b) How many 15x15mm die can be completely printed on a 100mm, 200mm, and 300mm wafer? Show
your work. Do not include partial fields; you may assume no scribe lines or edge exclusion zone. There
is no flat, only a notch for the 200mm and 300mm wafers. How many times more die can you get
when going from 200 to 300mm wafers? How does this number compare to the area increase
between 200 and 300mm?
c) Now assume a 100um scribe line and a 3mm edge exclusion zone. How may die per wafer for 200mm
and 300mm wafers? How did you calculate this – show your work. How does this compare to the area
ratio? Is it the same? If not, why not?
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