What changes would you make to get 20 - 5 nm resolution and diffraction limits in lithography? Show a relationship between resolution and diffraction and explain.

icon
Related questions
Question
7
Bars DRONM
What changes would you make to get 20 - 5 nm resolution and diffraction limits in lithography? Show a relationship between resolution and diffraction and
explain.
Transcribed Image Text:Bars DRONM What changes would you make to get 20 - 5 nm resolution and diffraction limits in lithography? Show a relationship between resolution and diffraction and explain.
Expert Solution
steps

Step by step

Solved in 2 steps with 2 images

Blurred answer