The table below shows some published values of the growth parameters of SiO2 on silicon. For the drygrowth process, the parameter t is already evaluated.Table 4.1 Oxidation coefficients for siliconDryWet (640 torr)Temperature ("C)A (µm)B (um'/hr)T (hr)A (um)B (um'/hr)0.3700.2350.1650.00118009200.500.2031.40.370.00490.01170.0270.2260.110.050.2870.5100.72010000.076110012000.0900.0400.0450.027a) At a temperature of 1100°C, what starting oxide thickness does this data for the dry oxidegrowth assume?b) Using the parameters in the above table, determine total thickness if a dry oxidation was carriedout for 5 hours at 1100°C. "

Answered: Image /qna-images/answer/adf43d46-cfbc-4b8c-8684-a6c0677d8369.jpg

The table below shows some published values of the growth parameters of SiO2 on silicon. For the dry growth process, the parameter z is already evaluated. Table 4.1 Oxidation coefficients for silicon Dry Wet (640 torr) Temperature (C) A (um) B (um/hr) 7 (hr) A (um) B (um³/hr) 800 920 0.370 0.235 0.165 0.0011 0.0049 1.4 0.50 0.203 0.37 0.076 0.027 1000 0.0117 0.226 0.287 0.510 0.720 0.090 0.027 0.11 1100 1200 0.040 0.045 0.05 a) At a temperature of 1100°C, what starting oxide thickness does this data for the dry oxide growth assume? b) Using the parameters in the above table, determine total thickness if a dry oxidation was carried out for 5 hours at 1100°C. “

The table below shows some published values of the growth parameters of SiO2 on silicon. For the dry growth process, the parameter z is already evaluated. Table 4.1 Oxidation coefficients for silicon Dry Wet (640 torr) Temperature (C) A (um) B (um/hr) 7 (hr) A (um) B (um³/hr) 800 920 0.370 0.235 0.165 0.0011 0.0049 1.4 0.50 0.203 0.37 0.076 0.027 1000 0.0117 0.226 0.287 0.510 0.720 0.090 0.027 0.11 1100 1200 0.040 0.045 0.05 a) At a temperature of 1100°C, what starting oxide thickness does this data for the dry oxide growth assume? b) Using the parameters in the above table, determine total thickness if a dry oxidation was carried out for 5 hours at 1100°C. “

Chemistry

10th Edition

ISBN:9781305957404

Author:Steven S. Zumdahl, Susan A. Zumdahl, Donald J. DeCoste

Publisher:Steven S. Zumdahl, Susan A. Zumdahl, Donald J. DeCoste

Chapter1: Chemical Foundations

Section: Chapter Questions

Problem 1RQ: Define and explain the differences between the following terms. a. law and theory b. theory and...

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