Part 1: An experiment was conducted to determine the effect of Hexafluoroethane C:Fs flow rate on the uniformity of the etch on a silicon wafer used in integrated circuit manufacturing. Four flow rates (in standard cubic centimeter per minute) are used in the experiment and the resulting uniformity (in percent) is shown here. C2F6 Flow 125 sccm 160 sccm 200 sccm 220 sccm 3.99 4.05 3.97 4.00 4.01 4.02 3.98 4.02 4.02 4.01 3.99 3.97 3.99 4.04 3.95 4.01 4.00 4.00 4.00 a. Identify the independent (factor) and dependent (response) variables in this study. What are the treatments? What are the experimental units? How can this be modelled by a completely randomized design experiment? b. Is the assumption of homogeneity of variances among the 4 groups satisfied? Justify by doing an 8-step procedure using Levene's approach. Use a 0.05 level of significance. STATISTICA output or PHSTAT output is also required. Is the assumption of normality for each treatment group satisfied? Justify by doing an 8-step procedure using Shapiro Wilk approach. Use a 0.05 level of significance. STATISTICA output is also required.
Part 1: An experiment was conducted to determine the effect of Hexafluoroethane C:Fs flow rate on the uniformity of the etch on a silicon wafer used in integrated circuit manufacturing. Four flow rates (in standard cubic centimeter per minute) are used in the experiment and the resulting uniformity (in percent) is shown here. C2F6 Flow 125 sccm 160 sccm 200 sccm 220 sccm 3.99 4.05 3.97 4.00 4.01 4.02 3.98 4.02 4.02 4.01 3.99 3.97 3.99 4.04 3.95 4.01 4.00 4.00 4.00 a. Identify the independent (factor) and dependent (response) variables in this study. What are the treatments? What are the experimental units? How can this be modelled by a completely randomized design experiment? b. Is the assumption of homogeneity of variances among the 4 groups satisfied? Justify by doing an 8-step procedure using Levene's approach. Use a 0.05 level of significance. STATISTICA output or PHSTAT output is also required. Is the assumption of normality for each treatment group satisfied? Justify by doing an 8-step procedure using Shapiro Wilk approach. Use a 0.05 level of significance. STATISTICA output is also required.
MATLAB: An Introduction with Applications
6th Edition
ISBN:9781119256830
Author:Amos Gilat
Publisher:Amos Gilat
Chapter1: Starting With Matlab
Section: Chapter Questions
Problem 1P
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