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Anisotropic silicon etching is used to create an inverted pyramid to serve as a microliter fluid reservoir. The mask layer is silicon nitride. The anisotropic etchant is EDP. Which of the following masks will yield the largest reservoir volume? Assume all the diagrams are drawn with same scale. 1.a 2.b and c 3.e 4.b and d 5.a and c 6.a, c and d <110> <110> <100> <100> <110> a a a a a a a a a a (a) (b) (c) (d) (e)

Anisotropic silicon etching is used to create an inverted pyramid to serve as a microliter fluid reservoir. The mask layer is silicon nitride. The anisotropic etchant is EDP. Which of the following masks will yield the largest reservoir volume? Assume all the diagrams are drawn with same scale. 1.a 2.b and c 3.e 4.b and d 5.a and c 6.a, c and d <110> <110> <100> <100> <110> a a a a a a a a a a (a) (b) (c) (d) (e)

Introduction to Chemical Engineering Thermodynamics
Introduction to Chemical Engineering Thermodynamics
8th Edition
ISBN:9781259696527
Author:J.M. Smith Termodinamica en ingenieria quimica, Hendrick C Van Ness, Michael Abbott, Mark Swihart
Publisher:J.M. Smith Termodinamica en ingenieria quimica, Hendrick C Van Ness, Michael Abbott, Mark Swihart
Chapter1: Introduction
Section: Chapter Questions
Problem 1.1P
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Problem 5 Anisotropic silicon etching is used to create an inverted pyramid to serve as a microliter fluid reservoir. The mask layer is silicon nitride. The anisotropic etchant is EDP. Which of the following masks will yield the largest reservoir volume? Assume all the diagrams are drawn with same scale. 1.а 2.b and c 3.e 4.b and d 5.a and c 6.a, c and d <110> <110> <100> <100> <110> a a a a a a a a a (a) (b) (c) (d) (e)
Transcribed Image Text:Problem 5 Anisotropic silicon etching is used to create an inverted pyramid to serve as a microliter fluid reservoir. The mask layer is silicon nitride. The anisotropic etchant is EDP. Which of the following masks will yield the largest reservoir volume? Assume all the diagrams are drawn with same scale. 1.а 2.b and c 3.e 4.b and d 5.a and c 6.a, c and d <110> <110> <100> <100> <110> a a a a a a a a a (a) (b) (c) (d) (e)
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