An SiO2 layer is formed on top of pure silicon. The Auger peak of silicon is at 91 eV. After oxidation, it is shifted to 78 eV. Therefore, pure and oxidized silicon are easily distinguishable. When the surface is oxidized, the silicon 91 eV peak intensity decreases because of attenuation by the silicon dioxide layer. After an SiO2 layer of thickness t is formed, the 91 eV Auger peak drops to 15% of its clean surface value. The angle of electron collection is 45o from the surface normal. If the mean free path is 0.5 nm for 91 eV electrons in silicon dioxide, what is the thickness t of the oxide coating

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An SiO2 layer is formed on top of pure silicon. The Auger peak of silicon is at 91 eV. After

oxidation, it is shifted to 78 eV. Therefore, pure and oxidized silicon are easily distinguishable.

When the surface is oxidized, the silicon 91 eV peak intensity decreases because of attenuation

by the silicon dioxide layer. After an SiO2 layer of thickness t is formed, the 91 eV Auger peak

drops to 15% of its clean surface value. The angle of electron collection is 45o from the surface

normal. If the mean free path is 0.5 nm for 91 eV electrons in silicon dioxide, what is the

thickness t of the oxide coating

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