A cantilever beam model is often used to represent micro-electrical-mechanical systems (MEMS) (see figure).MCantilever beamElectrodeDielectric substratePolysilicon anchorThe cantilever beam is made of polysilicon (E = 150 GPa) and is subjected to an electrostatic moment M applied at the end of the cantilever beam. If dimensions are b = 1.5 pm, h = 4.3 pm, and L = 300 pm, find expressions for the tip deflection and rotation of thecantilever beam in terms of moment M. (Use available deflection formulas. The beam has constant flexural rigidity EI. Enter the coefficient for M in N-1 for tip deflection and in Num-1 for tip rotation. Enter the magnitudes.)tip deflectionMtip rotationM

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A cantilever beam model is often used to represent micro-electrical-mechanical systems (MEMS) (see figure). Cantilever beam Electrode Dielectric substrate Polysilicon anchor The cantilever beam is made of polysilicon (E = 150 GPa) and is subjected to an electrostatic moment M applied at the end of the cantilever beam. If dimensions are b = 1.5 pm, h = 4.3 pm, and L = 300 um, find expressions for the tip deflection and rotation cantilever beam in terms of moment M. (Use available deflection formulas. The beam has constant flexural rigidity EI. Enter the coefficient for M in N- for tip deflection and in N"'um- for tip rotation. Enter the magnitudes.) tip deflection M

A cantilever beam model is often used to represent micro-electrical-mechanical systems (MEMS) (see figure). Cantilever beam Electrode Dielectric substrate Polysilicon anchor The cantilever beam is made of polysilicon (E = 150 GPa) and is subjected to an electrostatic moment M applied at the end of the cantilever beam. If dimensions are b = 1.5 pm, h = 4.3 pm, and L = 300 um, find expressions for the tip deflection and rotation cantilever beam in terms of moment M. (Use available deflection formulas. The beam has constant flexural rigidity EI. Enter the coefficient for M in N- for tip deflection and in N"'um- for tip rotation. Enter the magnitudes.) tip deflection M

Structural Analysis

6th Edition

ISBN:9781337630931

Author:KASSIMALI, Aslam.

Publisher:KASSIMALI, Aslam.

Chapter2: Loads On Structures

Section: Chapter Questions

Problem 1P

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Question

A cantilever beam model is often used to represent micro-electrical-mechanical systems (MEMS) (see figure).
M
Cantilever beam
Electrode
Dielectric substrate
Polysilicon anchor
The cantilever beam is made of polysilicon (E = 150 GPa) and is subjected to an electrostatic moment M applied at the end of the cantilever beam. If dimensions are b = 1.5 pm, h = 4.3 pm, and L = 300 pm, find expressions for the tip deflection and rotation of the
cantilever beam in terms of moment M. (Use available deflection formulas. The beam has constant flexural rigidity EI. Enter the coefficient for M in N-1 for tip deflection and in Num-1 for tip rotation. Enter the magnitudes.)
tip deflection
M
tip rotation
M

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