a) A Transmission Electron Microscope (TEM) is used with an accelerating voltage of 180 kV. i) Calculate the de Broglie wavelength of the electrons. Take the mass of the electron to be 9.1 X 1031 kg and the charge on the electron to be 1.6 x 10-19 Coulombs. Planck's constant is 6.6 X 10 4 m²kg/scc. ii) Estimate the resolution of the TEM. Take the Numerical aperture to be 0.02 and assume a kj value of 0.6. iii) Based on your results, do you think the TEM would be capable of imaging the channel in the state of the art (2020) 5 nm chipset built by Samsung in their Pycongtack fab? Justify your answer.

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a) A Transmission Electron Microscope (TEM) is used with an accelerating voltage of
180 kV.
i) Calculate the de Broglie wavelength of the electrons. Take the mass of the electron
to be 9.1 X 10-31 kg and the charge on the electron to be 1.6 x 10-19 Coulombs.
Planck's constant is 6.6 X 1034 m²kg/sec.
ii) Estimate the resolution of the TEM. Take the Numerical aperture to be 0.02 and
assume a kj value of 0.6.
iii) Based on your results, do you think the TEM would be capable of imaging the
channel in the state of the art (2020) 5 nm chipset built by Samsung in their
Pyeongtaek fab? Justify your answer.
iv) A MOSFET channel is 5 nm across, estimate how many silicon atoms span this
channel length.
v) Could the TEM discussed here image individual atoms in the channel? Justify your
answer.
Transcribed Image Text:a) A Transmission Electron Microscope (TEM) is used with an accelerating voltage of 180 kV. i) Calculate the de Broglie wavelength of the electrons. Take the mass of the electron to be 9.1 X 10-31 kg and the charge on the electron to be 1.6 x 10-19 Coulombs. Planck's constant is 6.6 X 1034 m²kg/sec. ii) Estimate the resolution of the TEM. Take the Numerical aperture to be 0.02 and assume a kj value of 0.6. iii) Based on your results, do you think the TEM would be capable of imaging the channel in the state of the art (2020) 5 nm chipset built by Samsung in their Pyeongtaek fab? Justify your answer. iv) A MOSFET channel is 5 nm across, estimate how many silicon atoms span this channel length. v) Could the TEM discussed here image individual atoms in the channel? Justify your answer.
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