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4. Calculate the followings. Ar 100 sccm R= 50cm. 100m Torr, 25°C Wafer 300mm in diameter (111) Si wafer 1m long tube 5cm in diameter Pump 400l/min 20cm (a) Calculate residence time of Ar flow in the reactor in seconds. [10pts] (b) Assume that 0.1% of foreign molecules are mixed in the chamber. Calculate the time required for the formation of 1 monolayer of the foreign molecules. Sticking probability 10.³.

4. Calculate the followings. Ar 100 sccm R= 50cm. 100m Torr, 25°C Wafer 300mm in diameter (111) Si wafer 1m long tube 5cm in diameter Pump 400l/min 20cm (a) Calculate residence time of Ar flow in the reactor in seconds. [10pts] (b) Assume that 0.1% of foreign molecules are mixed in the chamber. Calculate the time required for the formation of 1 monolayer of the foreign molecules. Sticking probability 10.³.

Applications and Investigations in Earth Science (9th Edition)
Applications and Investigations in Earth Science (9th Edition)
9th Edition
ISBN:9780134746241
Author:Edward J. Tarbuck, Frederick K. Lutgens, Dennis G. Tasa
Publisher:Edward J. Tarbuck, Frederick K. Lutgens, Dennis G. Tasa
Chapter1: The Study Of Minerals
Section: Chapter Questions
Problem 1LR
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4. Calculate the followings. Ar 100 sccm R= 50cm 100m Torr, 25°C Wafer 300mm in diameter (111) Si wafer 1m long tube 5cm in diameter Pump 400l/min 20cm (a) Calculate residence time of Ar flow in the reactor in seconds. [10pts] (b) Assume that 0.1% of foreign molecules are mixed in the chamber. Calculate the time required for the formation of 1 monolayer of the foreign molecules. Sticking probability 10-³.
Transcribed Image Text:4. Calculate the followings. Ar 100 sccm R= 50cm 100m Torr, 25°C Wafer 300mm in diameter (111) Si wafer 1m long tube 5cm in diameter Pump 400l/min 20cm (a) Calculate residence time of Ar flow in the reactor in seconds. [10pts] (b) Assume that 0.1% of foreign molecules are mixed in the chamber. Calculate the time required for the formation of 1 monolayer of the foreign molecules. Sticking probability 10-³.
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