27.4 One step of the manufacturing of silicon solar cells is the molecular diffusion (doping) of elemental phosphorous (P) into crystalline silicon to make an n-type semiconductor. This P- doped layer needs to be at least 0.467 μm into the 200-μm thick wafer. The present diffusion process is carried out at 1000 C. Data for the total amount of phosphorous atoms loaded into the silicon wafer vs. time at 1000 C are presented in the figure below. The maximum solubility of phosphorous within crystal- line silicon is 1.0 102¹ P atoms/cm³ at 1000 C. The square silicon wafer has a surface area of 100 cm² (10 cm/side). Initially, there is no phosphorous impurity in the crystalline silicon. What is the concentration of P atoms (atoms P/cm³) doped into the silicon at a depth of 0.467 um after 40 min, based on the data provided?

Introduction to Chemical Engineering Thermodynamics
8th Edition
ISBN:9781259696527
Author:J.M. Smith Termodinamica en ingenieria quimica, Hendrick C Van Ness, Michael Abbott, Mark Swihart
Publisher:J.M. Smith Termodinamica en ingenieria quimica, Hendrick C Van Ness, Michael Abbott, Mark Swihart
Chapter1: Introduction
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27.4 One step of the manufacturing of silicon solar cells is the
molecular diffusion (doping) of elemental phosphorous (P) into
crystalline silicon to make an n-type semiconductor. This P-
doped layer needs to be at least 0.467 µm into the 200-μm thick
wafer. The present diffusion process is carried out at 1000 C.
Data for the total amount of phosphorous atoms loaded into the
silicon wafer vs. time at 1000 C are presented in the figure
below. The maximum solubility of phosphorous within crystal-
line silicon is 1.0 10²¹ P atoms/cm³ at 1000 C. The square
silicon wafer has a surface area of 100 cm² (10 cm/side).
Initially, there is no phosphorous impurity in the crystalline
silicon. What is the concentration of P atoms (atoms P/cm³)
doped into the silicon at a depth of 0.467 µm after 40 min, based
on the data provided?
ma(t) (total atoms P in silicon)
6.0E+18
5.0E+18
4.0E+18
3.0E+18
2.0E+18
1.0E+18
0.0E+00
0
20
40
60
t1/2 (sec) ¹1/2
80
100
Transcribed Image Text:27.4 One step of the manufacturing of silicon solar cells is the molecular diffusion (doping) of elemental phosphorous (P) into crystalline silicon to make an n-type semiconductor. This P- doped layer needs to be at least 0.467 µm into the 200-μm thick wafer. The present diffusion process is carried out at 1000 C. Data for the total amount of phosphorous atoms loaded into the silicon wafer vs. time at 1000 C are presented in the figure below. The maximum solubility of phosphorous within crystal- line silicon is 1.0 10²¹ P atoms/cm³ at 1000 C. The square silicon wafer has a surface area of 100 cm² (10 cm/side). Initially, there is no phosphorous impurity in the crystalline silicon. What is the concentration of P atoms (atoms P/cm³) doped into the silicon at a depth of 0.467 µm after 40 min, based on the data provided? ma(t) (total atoms P in silicon) 6.0E+18 5.0E+18 4.0E+18 3.0E+18 2.0E+18 1.0E+18 0.0E+00 0 20 40 60 t1/2 (sec) ¹1/2 80 100
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