100mm diameter silicon wafer has 1μm lines fabricated on it. The photomask is made of soda lime glass with a coefficient of thermal expansion (CTE) of 10 ppm (10 × 10−6/ ◦C). How accurately must the temperature in the patterning process be controlled in order to keep distortions from thermal expansion over 100mm wafer below 0.3μm? Silicon CTE is 2.5 × 10−6/ ◦C.
Compton effect
The incoming photons' energy must be in the range of an X-ray frequency to generate the Compton effect. The electron does not lose enough energy that reduces the wavelength of scattered photons towards the visible spectrum. As a result, with visible lights, the Compton effect is missing.
Recoil Velocity
The amount of backward thrust or force experienced by a person when he/she shoots a gun in the forward direction is called recoil velocity. This phenomenon always follows the law of conservation of linear momentum.
100mm diameter silicon wafer has 1μm lines fabricated on it. The photomask is made
of soda lime glass with a coefficient of thermal expansion (CTE) of 10 ppm (10 × 10−6/
◦C). How accurately must the temperature in the patterning process be controlled in
order to keep distortions from thermal expansion over 100mm wafer below 0.3μm?
Silicon CTE is 2.5 × 10−6/ ◦C.
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