1. Give a brief answer for each of the following. (a) How is the cleanroom classified? (b) What are the three levels for contaminant reduction in microfabrication. Briefly explain them. (c) Describe the entire silicon wafer cleaning procedure (including pre-cycle clean, SC-I, and SC-II cleaning. Briefly explain the main clean purpose in each cleaning step

1. Give a brief answer for each of the following. (a) How is the cleanroom classified? (b) What are the three levels for contaminant reduction in microfabrication. Briefly explain them. (c) Describe the entire silicon wafer cleaning procedure (including pre-cycle clean, SC-I, and SC-II cleaning. Briefly explain the main clean purpose in each cleaning step

Surgical Tech For Surgical Tech Pos Care

5th Edition

ISBN:9781337648868

Author:Association

Publisher:Association

Chapter5: Physical Environment And Safety Standards

Section: Chapter Questions

Problem 5QFS

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